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Leading Display & Semiconductor Equipment Parts & 5-axis machining in the defense industry Manufacturer

Chemical Vapor Deposition

With the best processing technology and cutting-edge equipment, we are manufacturing CVD-related items and the technology, this technology is verif ed in various aspects.

SUSCEPTOR

  • Heating plate (Max at 450 Degrees Celsius)
  • Heating and maintaining the temperature of the glass and supporting/holding the glass in place
  • Temperature uniformity and vacuum leak prevention are important
  • Patented Automatic Precise Compression Molding
  • FSW(Friction Stir Welding) Applied
  • Material : Aluminium 6061

DIFFUSER

  • Spreads process gas uniformly over the glass
  • Microhole processing technology
    (Micro drill Ø0.35 ~ Ø0.50)
  • Uniform microhole processing
  • Material : Aluminium 6061

BACKING PLATE

  • Diffuses process gas uniformly so that the process gas can be delievered uniformly to the diffuser
  • Material : Aluminium 6061

SHADOW FRAME

  • Holds glass settled on the susceptor and masks the work zone of the glass
  • Material : Aluminium 6061