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Dry Etch
With the best processing technology and cutting-edge equipment, we are producing various items by dry etch, and the technology for this f eld is growing via continuous research and development.
UPPER ELECTRODE
- Takes the role of the electrode to generate plasma
- Injection equipment for processing gas
- Deburring is important for the microhole process
- Material : Aluminium 6061
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LOWER ELECTRODE
- Supports the glass
- The degree of even surface and parallelization is important
- Material : Aluminium 5052
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COOLING PLATE
- Lowers the inner temperature of the chamber
- The cooling line is processed as a water line instead of the gun-drill method, and the cover is assembled and welded using FSW.
- Leak prevention is important
- Material : Aluminium 5052
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