Products

Leading Display & Semiconductor Equipment Parts Manufacturer L-TECH

Dry Etch

With the best processing technology and cutting-edge equipment, we are producing various items by dry etch, and the technology for this f eld is growing via continuous research and development.

UPPER ELECTRODE

  • Takes the role of the electrode to generate plasma
  • Injection equipment for processing gas
  • Deburring is important for the microhole process
  • Material : Aluminium 6061

LOWER ELECTRODE

  • Supports the glass
  • The degree of even surface and parallelization is important
  • Material : Aluminium 5052

COOLING PLATE

  • Lowers the inner temperature of the chamber
  • The cooling line is processed as a water line instead of the gun-drill method, and the cover is assembled and welded using FSW.
  • Leak prevention is important
  • Material : Aluminium 5052